M. David Henry

Hertz Fellow: M. David Henry

California Institute of Technology

Area of Study

Applied Physics; Integration of NMR onto Silicon

Fellowship Years

2005 - 2010

David’s research was a top-down fabrication technique of silicon nanostructures, investigating electrical, optical, and mechanical properties of etched silicon nanowires. Other research interests include designing and fabricating silicon based sensors and devices on the micro- and nano-scale. David specializes in silicon etching techniques using inductively coupled plasma reactive ion etchers and plasma enhanced chemical vapor desposition.

Upon graduation, David accepted a Staff Researcher position (Senior Member of the Technical Staff) at Sandia National Laboratory in New Mexico where he continues investigation of silicon fabrication techniques and integrating MEMs, optical, and electrical devices.

David is a PADI Master Scuba Diver Trainer and a certified Technical Diver, an avid mountaineer, book collector, and he enjoys spending time with his wife and daughter.


2010 - Plasma Etching of Silicon Nanostructures